Creation of perfect surfaces

Authors :: Mori, Yuzo
Yamamura, Kazuya
Endo, Katsuyoshi
Yamauchi, Kazuto
Yasutake, Kiyoshi
Goto, Hidekazu
Kakiuchi, Hiroaki
Sano, Yasuhisa
Mimura, Hidekazu
Source :: Journal of Crystal Growth. Feb2005, Vol. 275 Issue 1/2, p39-50. 12p.
Publication Year :: 2005
Abstract: Abstract: The paper overviews research activities at the “Research Center for Ultra Precision Science & Technology of Osaka University”. It describes the motivation of the research, and the physical concepts of new ultraprecision machining methods; i.e. elastic emission machining (EEM), plasma chemical vaporization machining (PCVM), atmospheric pressure plasma chemical vapor deposition (PCVD), and hydroxyl electrochemical machining (H-ECM), and some application examples achieved by utilizing above methods are introduced. [Copyright &y& Elsevier]