Simulation and comparison of power generation through vibrational analysis for PMN-PZT on silicon substrate and PMN-PZT on aluminum based MEMS piezoelectric energy harvester.

This study employs a MEMS piezoelectric vibrational energy harvesting laboratory to simulate and compare the average harvested power and natural frequency for piezoelectric materials like lead magnesium niobate-lead zirconate titanate (PMN-PZT) on silicon and aluminium substrates of thicknesses ranging from 80 m to 800 m. Both instruments were put through an independent sample t-test using SPSS's statistical analysis options, with a pretest power of 80% and an error rate of =0.05. SPSS discovered that the average harvested power for the PMN-PZT/Si based MEMS energy harvester and the PMN-PZT/Al based MEMS energy harvester were both 3.31E-05 W and 3.38E-02 W, respectively, both of which were statistically insignificant at the p 0.05 level. The PMN-PZT/Al based MEMS piezoelectric energy harvester has a somewhat lower average collected power and natural frequency than PMN-PZT/Si, making it a viable alternative for low power applications. [ABSTRACT FROM AUTHOR]