Cite
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber.
MLA
An, Surin, et al. “Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber.” IEEE Transactions on Semiconductor Manufacturing, vol. 37, no. 2, May 2024, pp. 207–21. EBSCOhost, https://doi.org/10.1109/TSM.2024.3365827.
APA
An, S., Choi, J. E., Kang, J. E., Lee, J., & Hong, S. J. (2024). Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber. IEEE Transactions on Semiconductor Manufacturing, 37(2), 207–221. https://doi.org/10.1109/TSM.2024.3365827
Chicago
An, Surin, Jeong Eun Choi, Ju Eun Kang, Jiseok Lee, and Sang Jeen Hong. 2024. “Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber.” IEEE Transactions on Semiconductor Manufacturing 37 (2): 207–21. doi:10.1109/TSM.2024.3365827.