Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications.

MLA

Hardy, Aaron, et al. “Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications.” IEEE Transactions on Semiconductor Manufacturing, vol. 37, no. 2, May 2024, pp. 190–98. EBSCOhost, https://doi.org/10.1109/TSM.2024.3383287.

APA

Hardy, A., Muehle, M., Herrera-Rodriguez, C., Becker, M., Drown, E., Baule, N., Tompkins, M., Grotjohn, T., & Albrecht, J. D. (2024). Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications. IEEE Transactions on Semiconductor Manufacturing, 37(2), 190–198. https://doi.org/10.1109/TSM.2024.3383287

Chicago

Hardy, Aaron, Matthias Muehle, Cristian Herrera-Rodriguez, Michael Becker, Edward Drown, Nina Baule, Mark Tompkins, Timothy Grotjohn, and John D. Albrecht. 2024. “Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications.” IEEE Transactions on Semiconductor Manufacturing 37 (2): 190–98. doi:10.1109/TSM.2024.3383287.