Particle size dependence of nanoclustered ceria abrasives on surface activity and chemical mechanical planarization performance.

MLA

Kim, Na-Yeon, et al. “Particle Size Dependence of Nanoclustered Ceria Abrasives on Surface Activity and Chemical Mechanical Planarization Performance.” Applied Surface Science, vol. 663, Aug. 2024, p. N.PAG. EBSCOhost, https://doi.org/10.1016/j.apsusc.2024.160123.

APA

Kim, N.-Y., Hwang, U., Sung, J., Park, I.-K., Kim, T., Suhr, J., & Nam, J.-D. (2024). Particle size dependence of nanoclustered ceria abrasives on surface activity and chemical mechanical planarization performance. Applied Surface Science, 663, N.PAG. https://doi.org/10.1016/j.apsusc.2024.160123

Chicago

Kim, Na-Yeon, Uiseok Hwang, Jaeuk Sung, In-Kyung Park, Taesung Kim, Jonghwan Suhr, and Jae-Do Nam. 2024. “Particle Size Dependence of Nanoclustered Ceria Abrasives on Surface Activity and Chemical Mechanical Planarization Performance.” Applied Surface Science 663 (August): N.PAG. doi:10.1016/j.apsusc.2024.160123.