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Vertical field‐effect transistor using  c‐axis aligned crystal indium–gallium–zinc oxide on glass substrate and prototype organic light‐emitting diode display.

Authors :
Nakada, Masataka
Shima, Yukinori
Jincho, Masami
Sato, Manabu
Kurosaki, Daisuke
Koezuka, Junichi
Okazaki, Kenichi
Saito, Motoharu
Kusunoki, Koji
Atsumi, Tomoaki
Seo, Norihiko
Yamazaki, Shunpei
Source :
Journal of the Society for Information Display. Jul2024, Vol. 32 Issue 7, p501-513. 13p.
Publication Year :
2024

Abstract

This study developed a technology for a vertical field‐effect transistor (VFET) incorporating c‐axis aligned crystal oxide semiconductor on a Gen 3.5 glass substrate. VFETs, with a channel length of 0.5 μm, demonstrated stable characteristics with minimal variation, higher on‐state current compared with low‐temperature polysilicon FETs, and extremely low off‐state leakage current. A prototype 513‐ppi organic light‐emitting diode display that features a red, green, and blue stripe arrangement and includes an internal compensation circuit with a configuration of six transistors and two capacitors was fabricated by harnessing the advantageous features of VFETs. Such a display was previously unattainable with planar FETs. Thus, the developed VFET technology presents a viable pathway for achieving ultrahigh‐resolution panels on glass substrates. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
10710922
Volume :
32
Issue :
7
Database :
Academic Search Index
Journal :
Journal of the Society for Information Display
Publication Type :
Academic Journal
Accession number :
178318530
Full Text :
https://doi.org/10.1002/jsid.1334