Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing.

MLA

Choi, Jeongsub, et al. “Convolutional Neural Network Based Multi-Input Multi-Output Model for Multi-Sensor Multivariate Virtual Metrology in Semiconductor Manufacturing.” Annals of Operations Research, vol. 339, no. 1/2, Aug. 2024, pp. 185–201. EBSCOhost, https://doi.org/10.1007/s10479-024-05902-z.

APA

Choi, J., Zhu, M., Kang, J., & Jeong, M. K. (2024). Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing. Annals of Operations Research, 339(1/2), 185–201. https://doi.org/10.1007/s10479-024-05902-z

Chicago

Choi, Jeongsub, Mengmeng Zhu, Jihoon Kang, and Myong K. Jeong. 2024. “Convolutional Neural Network Based Multi-Input Multi-Output Model for Multi-Sensor Multivariate Virtual Metrology in Semiconductor Manufacturing.” Annals of Operations Research 339 (1/2): 185–201. doi:10.1007/s10479-024-05902-z.