Determination of the electron temperature and electron density in reduced pressure hydrogen peroxide (H2O2) discharge.

A reduced pressure glow discharge is produced by passing a high-power pulsed DC source of 0–500 W with a frequency of 50 Hz across two parallel disk electrodes. A hydrogen peroxide aqueous solution is used as a flowing gas for discharge generation. Optical emission spectroscopy is employed to diagnose the discharge generated at a reduced pressure of 0.2 mbar with an electrode gap of 4 cm. The spectra are recorded at a power density of 9.4 mW/cm3 and typically lie in the visible wavelength range of 380–880 nm. The spectra are analyzed using the line intensity ratio method to estimate electron temperature and density. The results indicated that the electron temperature and density are, respectively, 0.87 eV and 6.4 × 1014 cm−3. [ABSTRACT FROM AUTHOR]