Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics.

MLA

Abdi, S., et al. “Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics.” IEEE Transactions on Semiconductor Manufacturing, vol. 37, no. 3, Aug. 2024, pp. 229–37. EBSCOhost, https://doi.org/10.1109/TSM.2024.3382511.

APA

Abdi, S., Nodjiadjim, V., Hersent, R., Riet, M., Mismer, C., de Vries, T., Williams, K. A., & Jiao, Y. (2024). Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics. IEEE Transactions on Semiconductor Manufacturing, 37(3), 229–237. https://doi.org/10.1109/TSM.2024.3382511

Chicago

Abdi, S., V. Nodjiadjim, R. Hersent, M. Riet, C. Mismer, T. de Vries, K. A. Williams, and Y. Jiao. 2024. “Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics.” IEEE Transactions on Semiconductor Manufacturing 37 (3): 229–37. doi:10.1109/TSM.2024.3382511.