Polarity control and crystalline quality improvement of AlN thin films grown on Si(111) substrates by molecular beam epitaxy.

MLA

Fan, Shizhao, et al. “Polarity Control and Crystalline Quality Improvement of AlN Thin Films Grown on Si(111) Substrates by Molecular Beam Epitaxy.” Journal of Applied Physics, vol. 136, no. 14, Oct. 2024, pp. 1–11. EBSCOhost, https://doi.org/10.1063/5.0219167.

APA

Fan, S., Yin, Y., Liu, R., Zhao, H., Liu, Z., Sun, Q., & Yang, H. (2024). Polarity control and crystalline quality improvement of AlN thin films grown on Si(111) substrates by molecular beam epitaxy. Journal of Applied Physics, 136(14), 1–11. https://doi.org/10.1063/5.0219167

Chicago

Fan, Shizhao, Yuhao Yin, Rong Liu, Haiyang Zhao, Zhenghui Liu, Qian Sun, and Hui Yang. 2024. “Polarity Control and Crystalline Quality Improvement of AlN Thin Films Grown on Si(111) Substrates by Molecular Beam Epitaxy.” Journal of Applied Physics 136 (14): 1–11. doi:10.1063/5.0219167.