Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts.

MLA

Marchack, Nathan, and Eric A. Joseph. “Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts.” IEEE Transactions on Semiconductor Manufacturing, vol. 37, no. 4, Nov. 2024, pp. 453–57. EBSCOhost, https://doi.org/10.1109/TSM.2024.3439271.

APA

Marchack, N., & Joseph, E. A. (2024). Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts. IEEE Transactions on Semiconductor Manufacturing, 37(4), 453–457. https://doi.org/10.1109/TSM.2024.3439271

Chicago

Marchack, Nathan, and Eric A. Joseph. 2024. “Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts.” IEEE Transactions on Semiconductor Manufacturing 37 (4): 453–57. doi:10.1109/TSM.2024.3439271.