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Dynamics of MEMS electrostatic driving using a photovoltaic source
- Source :
-
Sensors & Actuators A: Physical . May2005, Vol. 121 Issue 1, p237-242. 6p. - Publication Year :
- 2005
-
Abstract
- Abstract: In this paper we study the potential use of a photovoltaic source as direct drive of electrostatic actuators, mainly for two reasons: first, because the I–V characteristic of a PV array has the shape of a current source limited in voltage and, second, because direct drive with galvanic isolation can be implemented at high voltages without using any dc/dc converter. We have used a standard PSpice model for a PV series array and a PSpice model of an electrostatic actuator. For sake of generality, the model for the PV array is the same one would like to use for the output circuit of a number of opto-couplers connected in series. Main parameters are: irradiance, I–V curve, and voltage, current and movement of the actuator (deflection) as a function of time. The number and surface of individual solar cells can be tailored to drive specific MEMS switches of high pull-in voltage value. As an example, a 14 cells-PV array, with a short circuit density current I sc =1.2nA, and open circuit voltage V oc =8.7V, would drive an electrostatic actuator having a pull-in voltage of 8.3V, with three orders of magnitude lower kinetic energy than the equivalent voltage-drive. Both, this reduction in the kinetic energy at the impact, as well as the low hold-on voltage in the photovoltaic actuation reduce the electric field across the dielectric, which may lead to better reliability performance. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 121
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators A: Physical
- Publication Type :
- Academic Journal
- Accession number :
- 18134600
- Full Text :
- https://doi.org/10.1016/j.sna.2005.02.003