A 2-DOF piezoelectric platform for cross-scale semiconductor inspection.

MLA

Yuan, Lusheng, et al. “A 2-DOF Piezoelectric Platform for Cross-Scale Semiconductor Inspection.” International Journal of Mechanical Sciences, vol. 284, Dec. 2024, p. N.PAG. EBSCOhost, https://doi.org/10.1016/j.ijmecsci.2024.109765.

APA

Yuan, L., Wang, L., Qi, R., Li, Y., Liu, C., & Luo, G. (2024). A 2-DOF piezoelectric platform for cross-scale semiconductor inspection. International Journal of Mechanical Sciences, 284, N.PAG. https://doi.org/10.1016/j.ijmecsci.2024.109765

Chicago

Yuan, Lusheng, Liang Wang, Rui Qi, Yan Li, Chuangye Liu, and Gang Luo. 2024. “A 2-DOF Piezoelectric Platform for Cross-Scale Semiconductor Inspection.” International Journal of Mechanical Sciences 284 (December): N.PAG. doi:10.1016/j.ijmecsci.2024.109765.