Silicon field emission array as novel charge neutralization device for high current ion implanter

MLA

Ishikawa, J., et al. “Silicon Field Emission Array as Novel Charge Neutralization Device for High Current Ion Implanter.” Nuclear Instruments & Methods in Physics Research Section B, vol. 237, no. 1/2, Aug. 2005, pp. 390–94. EBSCOhost, https://doi.org/10.1016/j.nimb.2005.05.033.

APA

Ishikawa, J., Gotoh, Y., Nakamura, K., Kojima, T., Tsuji, H., Ikejiri, T., Sakai, S., Umisedo, S., Nagai, N., Nagao, M., & Kanemaru, S. (2005). Silicon field emission array as novel charge neutralization device for high current ion implanter. Nuclear Instruments & Methods in Physics Research Section B, 237(1/2), 390–394. https://doi.org/10.1016/j.nimb.2005.05.033

Chicago

Ishikawa, J., Y. Gotoh, K. Nakamura, T. Kojima, H. Tsuji, T. Ikejiri, S. Sakai, et al. 2005. “Silicon Field Emission Array as Novel Charge Neutralization Device for High Current Ion Implanter.” Nuclear Instruments & Methods in Physics Research Section B 237 (1/2): 390–94. doi:10.1016/j.nimb.2005.05.033.