Self-assembly of metallic MEMS using Casimir forces: Fabrication, simulation and characterization.

A methodology of 3D self-assembly is presented, pairing neighboring electromechanical system (MEMS) elements to create Yin or Yang-shaped structures. After sacrificial layer removal and during the sequential drying process, (i) surface tension forces bring the neighboring MEMS shutter blades very close to each other, and (ii) Casimir forces and van der Waals forces keep the blades attached tightly. Various experimental trials to reopen the tight attachments are reported. The relative significance of fundamental forces during 1D and 3D scaling of the system is presented. [ABSTRACT FROM AUTHOR]