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Research of optical and structural properties in Cu/Ti multilayer films
- Source :
-
Vacuum . Oct2005, Vol. 80 Issue 4, p317-323. 7p. - Publication Year :
- 2005
-
Abstract
- Abstract: The Cu/Ti multilayer (ML) films were deposited on Si(100) and Si(111) substrate with a series of pair layers with Vanguard sputtering system. The influences of periodic number and substrate structure on UV-reflectivity of Cu/Ti superlattice films were investigated carefully. The result shows that the Cu/Ti ML films have clear layer-structure. The ML films deposited on Si(100) and Si(111) have UV-reflectivity of about 90% and 67% at 200nm, respectively, but they have lower soft X-ray reflectivity of about 1.9% at 13.04nm in terms of wavelength, with near normal incidence of 5°. The transmission microscope image indicates that the fabricated Cu/Ti ML films have superlattice structure. [Copyright &y& Elsevier]
- Subjects :
- *THIN films
*OPTICAL instruments
*PHYSICS instruments
*OPTICAL industry
Subjects
Details
- Language :
- English
- ISSN :
- 0042207X
- Volume :
- 80
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Vacuum
- Publication Type :
- Academic Journal
- Accession number :
- 18729666
- Full Text :
- https://doi.org/10.1016/j.vacuum.2005.06.009