Droplet-free high-density metal ion source for plasma immersion ion implantation

MLA

Nakamura, Keiji, et al. “Droplet-Free High-Density Metal Ion Source for Plasma Immersion Ion Implantation.” Nuclear Instruments & Methods in Physics Research Section B, vol. 242, no. 1/2, Jan. 2006, pp. 315–17. EBSCOhost, https://doi.org/10.1016/j.nimb.2005.08.050.

APA

Nakamura, K., Yoshinaga, H., & Yukimura, K. (2006). Droplet-free high-density metal ion source for plasma immersion ion implantation. Nuclear Instruments & Methods in Physics Research Section B, 242(1/2), 315–317. https://doi.org/10.1016/j.nimb.2005.08.050

Chicago

Nakamura, Keiji, Hiroaki Yoshinaga, and Ken Yukimura. 2006. “Droplet-Free High-Density Metal Ion Source for Plasma Immersion Ion Implantation.” Nuclear Instruments & Methods in Physics Research Section B 242 (1/2): 315–17. doi:10.1016/j.nimb.2005.08.050.