Cite
Detection of precursor molecules in the Metal Chloride Reduction CVD of Cu
MLA
Hibi, Atsushi, et al. “Detection of Precursor Molecules in the Metal Chloride Reduction CVD of Cu.” Surface & Coatings Technology, vol. 200, no. 10, Feb. 2006, pp. 3117–21. EBSCOhost, https://doi.org/10.1016/j.surfcoat.2005.07.010.
APA
Hibi, A., Tonegawa, H., Tonokura, K., Satake, K., Sakamoto, H., & Koshi, M. (2006). Detection of precursor molecules in the Metal Chloride Reduction CVD of Cu. Surface & Coatings Technology, 200(10), 3117–3121. https://doi.org/10.1016/j.surfcoat.2005.07.010
Chicago
Hibi, Atsushi, Hiroshi Tonegawa, Kenichi Tonokura, Kouji Satake, Hitoshi Sakamoto, and Mitsuo Koshi. 2006. “Detection of Precursor Molecules in the Metal Chloride Reduction CVD of Cu.” Surface & Coatings Technology 200 (10): 3117–21. doi:10.1016/j.surfcoat.2005.07.010.