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Varian, Nissin Settle Patent Suit.

Source :
Electronic News. 5/15/2006, Vol. 52 Issue 20, p57-57. 1p.
Publication Year :
2006

Abstract

The article reports on the settlement of a patent lawsuit filed by Varian Semiconductor Equipment Associates Inc. against Japan-based Nissin Ion Equipment Co. Ltd. The terms of the settlement did not include admission of infringement by Nissin. In a June 2004 lawsuit, Varian alleges that Nissin Ion infringed Varian patents titled Ion Beam Scanning Method and Apparatus and High Speed Movement of Workpieces in Vacuum Processing. Varian has emerged as the leading ion implant provider in 2005.

Details

Language :
English
ISSN :
10616624
Volume :
52
Issue :
20
Database :
Academic Search Index
Journal :
Electronic News
Publication Type :
Periodical
Accession number :
20965025