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Atomic rearrangements in HfO2/Si1-xGex interfaces.
- Source :
-
Applied Physics Letters . 9/25/2006, Vol. 89 Issue 13, p132904. 3p. 1 Chart, 2 Graphs. - Publication Year :
- 2006
-
Abstract
- Atomic exchanges across the interface between a HfO2 thin film and strained semiconducting Si1-xGex (x=0.1, 0.2, and 0.3) was investigated by extended x-ray absorption fine structures. Atomic layer deposition of HfO2 films on epitaxial Si1-xGex produces a Hf-silicate (Hf–O–Si bond) phase at the interface. Also O atoms diffuse into the Si1-xGex alloy to form Ge oxide in a segregated phase. This tendency becomes evident when the Ge concentration of the substrate becomes higher or when HfO2 is deposited and these samples are compared to the pure Si1-xGex substrates which have been exposed to ambient atmosphere. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 89
- Issue :
- 13
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 22643115
- Full Text :
- https://doi.org/10.1063/1.2357341