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A multilayer thick-film PZT actuator for MEMs applications
- Source :
-
Sensors & Actuators A: Physical . Nov2006, Vol. 132 Issue 1, p311-316. 6p. - Publication Year :
- 2006
-
Abstract
- Abstract: This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported. [Copyright &y& Elsevier]
- Subjects :
- *ELECTRIC equipment
*BULK solids
*AUTOMATIC control systems
*PHYSICS instruments
Subjects
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 132
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators A: Physical
- Publication Type :
- Academic Journal
- Accession number :
- 22794995
- Full Text :
- https://doi.org/10.1016/j.sna.2006.06.006