Large aperture VCSELs with a continuous-wave output power of 1.95W

Abstract: In this study, 980nm high-power bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) with large emission aperture are described. The devices have been fabricated by using oxidation confinement technology. Al2O3 film, instead of SiN x film, is used as the passivation layer to enhance heat dissipation. A distinguished device performance is achieved. The maximum continuous-wave (CW) output power of the large emission aperture devices with active diameters up to 500μm is as high as 1.95W at room temperature. [Copyright &y& Elsevier]