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Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing.
- Source :
-
AIP Conference Proceedings . 2007, Vol. 879 Issue 1, p967-970. 4p. 2 Charts, 6 Graphs. - Publication Year :
- 2007
-
Abstract
- We designed, fabricated and evaluated a total-reflection mirror having a designed focal size of 28 nm at 15keV. Line-focus tests on the fabricated mirror were carried out at the 1-km-long beamline (BL29XUL) of SPring-8. Nearly diffraction-limited performance with a full width at half maximum spot size of 30 nm was realized at 15 keV. We are planning to fabricate multilayer-coated mirror for realizing sub-10-nm focusing in hard x-ray region. We suggest a novel method of at-wavelength metrology. Wave-front error on the mirror surface can be estimated by a phase retrieval method using the intensity profile around the focal point. By correcting the estimated wave-front errors, sub-10-nm focusing is potentially feasible. © 2007 American Institute of Physics [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0094243X
- Volume :
- 879
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- AIP Conference Proceedings
- Publication Type :
- Conference
- Accession number :
- 23923811
- Full Text :
- https://doi.org/10.1063/1.2436223