Back to Search
Start Over
Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition
- Source :
-
Thin Solid Films . Feb2007, Vol. 515 Issue 7/8, p3352-3355. 4p. - Publication Year :
- 2007
-
Abstract
- Abstract: ZrO2 films were prepared by electron beam evaporation with glancing angle deposition (GLAD) technique. The as-deposition and annealed ZrO2 films are all amorphous, different from that deposited at normal incidence. Due to the shadowing effect, a highly orientated structure composed of slanted columns formed, and the obtained films became the mixture of slanted columns and voids. The relationship among the effective refractive index, packing density and flux incident angle was investigated. The refractive index and packing density of ZrO2 films decrease with the increase of the incident angle. The in-plane birefringence of GLAD ZrO2 films was calculated. At the packing density of 0.576, the maximum birefringence is 0.037. [Copyright &y& Elsevier]
- Subjects :
- *NANOSTRUCTURES
*REFRACTIVE index
*THIN films
*DOUBLE refraction
Subjects
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 515
- Issue :
- 7/8
- Database :
- Academic Search Index
- Journal :
- Thin Solid Films
- Publication Type :
- Academic Journal
- Accession number :
- 24045809
- Full Text :
- https://doi.org/10.1016/j.tsf.2006.09.020