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Reply by Liu et al.
- Source :
-
Applied Surface Science . Mar2007, Vol. 253 Issue 10, p4816-4817. 2p. - Publication Year :
- 2007
-
Abstract
- Abstract: The experimental results indicate that the composition of our samples is homogeneous. We have explained the reason why the composition of the BCN film is influenced by the r.f. power. The Fourier transformed infrared (FTIR) and X-ray photoelectron spectroscopy (XPS) measurements suggest that the samples are atomic-level hybrids of B, C and N. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 01694332
- Volume :
- 253
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- Applied Surface Science
- Publication Type :
- Academic Journal
- Accession number :
- 24138144
- Full Text :
- https://doi.org/10.1016/j.apsusc.2006.10.035