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Low-Frequency Series-Resistance Analytical Modeling of Three-Dimensional Metal-Insulator-Metal Capacitors.
- Source :
-
IEEE Transactions on Electron Devices . Apr2007, Vol. 54 Issue 4, p742-751. 10p. 7 Black and White Photographs, 2 Charts, 12 Graphs. - Publication Year :
- 2007
-
Abstract
- This paper discusses the optimization of series resistance of nonplanar metal-insulator-metal capacitor, i.e., an original 3-D capacitor with a capacitance density of 35 nF/mm², used in very large scale integration. A fully analytical and physically based model of its series resistance versus material and geometrical parameters has been developed, in excellent agreement with both 3-D numerical simulations and experiments. Based on the modeling results, possible design strategies of series-resistance reduction are suggested; showing a reduction of the series resistance by approximately a factor of four, without any degradation of the capacitance density. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 54
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 24637944
- Full Text :
- https://doi.org/10.1109/TED.2007.891851