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X-ray absorption of Si-C-N thin films: A comparison between crystalline and amorphous phases.
- Source :
-
Journal of Applied Physics . 11/15/1999, Vol. 86 Issue 10, p5609. 5p. 4 Graphs. - Publication Year :
- 1999
-
Abstract
- Presents a study which measured x-ray absorption near edge structure spectra of thin films using the fluorescence and sample drain current modes. Methodology; Results and discussion; Conclusion.
- Subjects :
- *X-ray absorption near edge structure
*SPECTRUM analysis
*THIN films
*FLUORESCENCE
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 86
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 2494456
- Full Text :
- https://doi.org/10.1063/1.371568