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Surface-plasmon polariton interference nanolithography based on end-fire coupling
- Source :
-
Microelectronic Engineering . May2007, Vol. 84 Issue 5-8, p1037-1040. 4p. - Publication Year :
- 2007
-
Abstract
- Abstract: We have preformed finite-difference time-domain (FDTD) analysis of surface-plasmon polaritons (SPPs) interference nanolithography based on end-fire coupling method. The simulated results show the interference of two face-to-face SPPs can fabricate an 80nm periodicity pattern at the incidence wavelength of 365nm, which surprisingly has long decay lengths for transverse and longitudinal directions and are insensitive to the focusing and alignment conditions. [Copyright &y& Elsevier]
- Subjects :
- *NANOSTRUCTURES
*PHYSICS
*ELECTRON optics
*ELECTRICAL engineering
Subjects
Details
- Language :
- English
- ISSN :
- 01679317
- Volume :
- 84
- Issue :
- 5-8
- Database :
- Academic Search Index
- Journal :
- Microelectronic Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 24968136
- Full Text :
- https://doi.org/10.1016/j.mee.2007.01.028