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Micro-inductors integrated on silicon for power supply on chip
- Source :
-
Journal of Magnetism & Magnetic Materials . Sep2007, Vol. 316 Issue 2, pe233-e237. 0p. - Publication Year :
- 2007
-
Abstract
- Abstract: This paper discusses the technologies required to produce magnetics on silicon for power supply on chip. Prototypes of micro-inductors have been fabricated using techniques such as thick copper coil deposition and improved magnetic materials. The measured maximum Q factor and inductance value are 5 at 2.5MHz and 38nH/mm2, respectively. The impact of seed layers and core overlap has been identified to be significant at high frequencies. Using the validated analytical model, the electrical performance of micro-inductors in a buck converter can be predicted and efficiency of 85.9 with a power density of 15.8W/cm2 can be achieved. [Copyright &y& Elsevier]
- Subjects :
- *POWER resources
*ELECTRICAL engineering
*ENGINEERING
*ELECTRICITY
Subjects
Details
- Language :
- English
- ISSN :
- 03048853
- Volume :
- 316
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Journal of Magnetism & Magnetic Materials
- Publication Type :
- Academic Journal
- Accession number :
- 25496699
- Full Text :
- https://doi.org/10.1016/j.jmmm.2007.02.098