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Influence of annealing on microstructure and NO2-sensing properties of sputtered WO3 thin films
- Source :
-
Sensors & Actuators B: Chemical . Dec2007, Vol. 128 Issue 1, p173-178. 6p. - Publication Year :
- 2007
-
Abstract
- Abstract: The influences of thermal annealing on the microstructure and NO2-sensing properties of sputtered WO3 thin films were investigated. The WO3 films as-deposited at room temperature were amorphous and would crystallize to monoclinic structure when annealed at 350°C or above. The grains and pores in the WO3 films grew larger with an increase in annealing temperature. The effective surface area and pore volume changed non-monotonously with increasing the annealing temperature. The film annealed at 350°C showed the largest effective surface area. The film annealed at 500°C had the largest pore volume. Among the films investigated in this study, the WO3 thin film annealed at 500°C showed the quickest response/recovery and the highest response to 10ppm NO2. These results indicate the importance of achieving porous structure on improving the gas sensing performance. [Copyright &y& Elsevier]
- Subjects :
- *ANNEALING of crystals
*MICROSTRUCTURE
*THIN films
*POROUS materials
Subjects
Details
- Language :
- English
- ISSN :
- 09254005
- Volume :
- 128
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators B: Chemical
- Publication Type :
- Academic Journal
- Accession number :
- 27626342
- Full Text :
- https://doi.org/10.1016/j.snb.2007.06.001