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Solid State Technology ONLINE.
- Source :
-
Solid State Technology . Dec2007, Vol. 50 Issue 12, p8-8. 1/2p. - Publication Year :
- 2007
-
Abstract
- Information about several papers discussed at a symposium on yield productivity in the industry sponsored by the International SEMATECH Manufacturing Initiative (ISMI), an alliance of semiconductor producer, is presented. Discussions on how to clean safely wafer chuck without solvents and on detecting and preventing discharge events. Moreover, a debate on whether the industry should shift to 450 millimeter wafers also transpired at the event.
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 50
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- Solid State Technology
- Publication Type :
- Academic Journal
- Accession number :
- 27820390