Back to Search
Start Over
Unidirectional variation of lattice constants of Al–N-codoped ZnO films by RF magnetron sputtering
- Source :
-
Applied Surface Science . Jan2008, Vol. 254 Issue 7, p2207-2210. 4p. - Publication Year :
- 2008
-
Abstract
- Abstract: Al–N-codoped ZnO films were fabricated by RF magnetron sputtering in the ambient of N2 and O2 on silicon (100) and homo-buffer layer, subsequently, annealed in O2 at low pressure. X-ray diffraction (XRD) spectra show that as-grown and 600°C annealed films grown by codoping method are prolonged along crystal c-axis. However, they are not prolonged in (001) plane vertical to c-axis. The films annealed at 800°C are not prolonged in any directions. Codoping makes ZnO films unidirectional variation. X-ray photoelectron spectroscopy (XPS) shows that Al content hardly varies and N escapes with increasing annealing temperature from 600°C to 800°C. [Copyright &y& Elsevier]
- Subjects :
- *SPECTRUM analysis
*QUALITATIVE chemical analysis
*THEORY of wave motion
*OPTICS
Subjects
Details
- Language :
- English
- ISSN :
- 01694332
- Volume :
- 254
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Applied Surface Science
- Publication Type :
- Academic Journal
- Accession number :
- 28402500
- Full Text :
- https://doi.org/10.1016/j.apsusc.2007.08.052