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Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element analysis.
- Source :
-
Review of Scientific Instruments . Jan2008, Vol. 79 Issue 1, p015105. 9p. 4 Diagrams, 2 Charts, 9 Graphs. - Publication Year :
- 2008
-
Abstract
- Piezoelectric tube scanners are widely used in scanning probe microscopes to position the sample or the probe. Fast and accurate scanning requires the suppression of dominant low-frequency resonances as well as the compensation of dynamics-coupling effects. The present article gives a detailed description of the fully coupled tube scanner dynamics over a wide frequency range modeled by finite element (FE) analysis using the commercially available software package ANSYS. The effect of a sample mass attached to the top of the tube is investigated by considering its added mass and local stiffening. A model order reduction scheme is applied to obtain a low order model that describes the lateral and vertical deflections as well as the voltage induced on quadrant electrodes. Comparison to experimental data demonstrates a good agreement for both the full FE model and reduced order model. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 79
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 29346636
- Full Text :
- https://doi.org/10.1063/1.2826428