Cite
Performance enhancement of excimer laser crystallized poly-Si thin film transistors with fluorine implantation technology
MLA
Tu, Chun-Hao, et al. “Performance Enhancement of Excimer Laser Crystallized Poly-Si Thin Film Transistors with Fluorine Implantation Technology.” Thin Solid Films, vol. 516, no. 10, Mar. 2008, pp. 3128–32. EBSCOhost, https://doi.org/10.1016/j.tsf.2007.08.038.
APA
Tu, C.-H., Chang, T.-C., Liu, P.-T., Yang, C.-Y., Feng, L.-W., Wu, Y.-C., Sze, S. M., & Chang, C.-Y. (2008). Performance enhancement of excimer laser crystallized poly-Si thin film transistors with fluorine implantation technology. Thin Solid Films, 516(10), 3128–3132. https://doi.org/10.1016/j.tsf.2007.08.038
Chicago
Tu, Chun-Hao, Ting-Chang Chang, Po-Tsun Liu, Che-Yu Yang, Li-Wei Feng, Yung-Chun Wu, Simon M. Sze, and Chun-Yen Chang. 2008. “Performance Enhancement of Excimer Laser Crystallized Poly-Si Thin Film Transistors with Fluorine Implantation Technology.” Thin Solid Films 516 (10): 3128–32. doi:10.1016/j.tsf.2007.08.038.