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An optical MEMS pressure sensor based on a phase demodulation method
- Source :
-
Sensors & Actuators A: Physical . May2008, Vol. 143 Issue 2, p224-229. 6p. - Publication Year :
- 2008
-
Abstract
- Abstract: A novel optical fiber pressure sensor based on a Fabry–Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon membrane size and sensor performance has been simulated. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range from 0 to 3MPa. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 143
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators A: Physical
- Publication Type :
- Academic Journal
- Accession number :
- 31559586
- Full Text :
- https://doi.org/10.1016/j.sna.2007.10.086