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Impact of high-thermal budget anneals on polysilicon as a micromechanical material.
- Source :
-
Journal of Microelectromechanical Systems . Mar98, Vol. 7 Issue 1, p102. 4p. 3 Black and White Photographs, 1 Diagram, 1 Chart, 4 Graphs. - Publication Year :
- 1998
-
Abstract
- Presents a study to evaluate the impact of high-thermal budget anneals on polysilicon under a variety of processing conditions. Details on experiments done during study; Findings of study; Discussion on findings.
- Subjects :
- *SILICON
*ANNEALING of metals
*SCIENTIFIC experimentation
Subjects
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 7
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 317692
- Full Text :
- https://doi.org/10.1109/84.661391