Back to Search
Start Over
The Influence of Elevated Temperature on Degradation and Lifetime Prediction of Thin Silicn-Dioxide Films.
- Source :
-
IEEE Transactions on Electron Devices . Jul2000, Vol. 47 Issue 7, p1514. 8p. 4 Black and White Photographs, 1 Diagram, 13 Graphs. - Publication Year :
- 2000
-
Abstract
- Presents a study which demonstrated the influence of elevated temperature on degradation and lifetime prediction of thin silicon-dioxide films. Experimental details; Results and discussion; Conclusion.
- Subjects :
- *HIGH temperatures
*THIN films
*SILICA
Subjects
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 47
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 3312260
- Full Text :
- https://doi.org/10.1109/16.848301