Cite
Enhanced electrical properties of atomic layer deposited La2O3 thin films with embedded ZrO2 nanocrystals.
MLA
Jinesh, K. B., et al. “Enhanced Electrical Properties of Atomic Layer Deposited La2O3 Thin Films with Embedded ZrO2 Nanocrystals.” Applied Physics Letters, vol. 93, no. 17, Oct. 2008, p. 172904. EBSCOhost, https://doi.org/10.1063/1.3009202.
APA
Jinesh, K. B., Klootwijk, J. H., Lamy, Y., Wolters, R., Tois, E., Tuominen, M., Roozeboom, F., & Besling, W. F. A. (2008). Enhanced electrical properties of atomic layer deposited La2O3 thin films with embedded ZrO2 nanocrystals. Applied Physics Letters, 93(17), 172904. https://doi.org/10.1063/1.3009202
Chicago
Jinesh, K. B., J. H. Klootwijk, Y. Lamy, R. Wolters, E. Tois, M. Tuominen, F. Roozeboom, and W. F. A. Besling. 2008. “Enhanced Electrical Properties of Atomic Layer Deposited La2O3 Thin Films with Embedded ZrO2 Nanocrystals.” Applied Physics Letters 93 (17): 172904. doi:10.1063/1.3009202.