Cite
Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices
MLA
Shih, Wen-Ching, et al. “Deposition of ZnO Thin Films on SiO2/Si Substrate with Al2O3 Buffer Layer by Radio Frequency Magnetron Sputtering for High Frequency Surface Acoustic Wave Devices.” Thin Solid Films, vol. 517, no. 11, Apr. 2009, pp. 3378–81. EBSCOhost, https://doi.org/10.1016/j.tsf.2008.12.008.
APA
Shih, W.-C., Su, H.-Y., & Wu, M.-S. (2009). Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices. Thin Solid Films, 517(11), 3378–3381. https://doi.org/10.1016/j.tsf.2008.12.008
Chicago
Shih, Wen-Ching, Hong-Yi Su, and Mu-Shiang Wu. 2009. “Deposition of ZnO Thin Films on SiO2/Si Substrate with Al2O3 Buffer Layer by Radio Frequency Magnetron Sputtering for High Frequency Surface Acoustic Wave Devices.” Thin Solid Films 517 (11): 3378–81. doi:10.1016/j.tsf.2008.12.008.