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Design and fabrication of a micromachined resonant gyroscope.
- Source :
-
International Journal of Electronics . Oct99, Vol. 86 Issue 10, p1179. 13p. - Publication Year :
- 1999
-
Abstract
- The micromachined gyroscope is rapidly gaining popularity as a rate sensor for application in areas such as automotive and aerospace systems, where low power consumption, high sensitivity, low temperature drift and good stability are prerequisites. In this paper, the overall design and fabrication process of a reactive ion-etched inertial resonant gyroscope based on the capacitive sensing principle is reported. The experimental results are also discussed. [ABSTRACT FROM AUTHOR]
- Subjects :
- *GYROSCOPES
*MICROELECTROMECHANICAL systems
DESIGN & construction
Subjects
Details
- Language :
- English
- ISSN :
- 00207217
- Volume :
- 86
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- International Journal of Electronics
- Publication Type :
- Academic Journal
- Accession number :
- 3811338
- Full Text :
- https://doi.org/10.1080/002072199132734