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Enhanced flow boiling heat transfer of FC-72 on micro-pin-finned surfaces
- Source :
-
International Journal of Heat & Mass Transfer . Jun2009, Vol. 52 Issue 13/14, p2925-2931. 7p. - Publication Year :
- 2009
-
Abstract
- Abstract: For the purpose of cooling electronic components with high heat flux efficiently, some experiments were conducted to study the flow boiling heat transfer performance of FC-72 on silicon chips. Micro-pin-fins were fabricated on the chip surface using a dry etching technique to enhance boiling heat transfer. Three different fluid velocities (0.5, 1 and 2m/s) and three different liquid subcoolings (15, 25 and 35K) were performed, respectively. A smooth chip (chip S) and four micro-pin-finned chips with the same fin thickness of 30μm and different fin heights of 60μm (chip PF30–60) and 120μm (chip PF30–120), respectively, were tested. All the micro-pin-finned surfaces show a considerable heat transfer enhancement compared to the smooth one, and the critical heat flux increases in the order of chip S, PF30–60 and PF30–120. For a lower ratio of fin height to fin pitch and/or higher fluid velocity, the fluid velocity has a positive effect on the nucleate boiling curves for the micro-pin-finned surfaces. At the velocities lower than 1m/s, the micro-pin-finned surfaces show a sharp increase in heat flux with increasing wall superheat, and the wall temperature at the critical heat flux (CHF) is less than the upper limit, 85°C, for the reliable operation of LSI chips. The CHF values for all surfaces increase with fluid velocity and subcooling. The maximum CHF can reach nearly 150W/cm2 for chip PF30–120 at the fluid velocity of 2m/s and the liquid subcooling of 35K. [Copyright &y& Elsevier]
- Subjects :
- *HEAT transfer
*EBULLITION
*HEAT flux
*PLASMA etching
*COOLING
*INTEGRATED circuits
Subjects
Details
- Language :
- English
- ISSN :
- 00179310
- Volume :
- 52
- Issue :
- 13/14
- Database :
- Academic Search Index
- Journal :
- International Journal of Heat & Mass Transfer
- Publication Type :
- Academic Journal
- Accession number :
- 38322416
- Full Text :
- https://doi.org/10.1016/j.ijheatmasstransfer.2009.02.031