Crystal quality improvement of solid-phase crystallized evaporated silicon films by in-situ densification anneal

MLA

He, Song, et al. “Crystal Quality Improvement of Solid-Phase Crystallized Evaporated Silicon Films by in-Situ Densification Anneal.” Solar Energy Materials & Solar Cells, vol. 93, no. 6/7, June 2009, pp. 1116–19. EBSCOhost, https://doi.org/10.1016/j.solmat.2009.01.012.

APA

He, S., Hoex, B., Inns, D., Brazil, I. C., Widenborg, P. I., & Aberle, A. G. (2009). Crystal quality improvement of solid-phase crystallized evaporated silicon films by in-situ densification anneal. Solar Energy Materials & Solar Cells, 93(6/7), 1116–1119. https://doi.org/10.1016/j.solmat.2009.01.012

Chicago

He, Song, Bram Hoex, Daniel Inns, Ian C. Brazil, Per I. Widenborg, and Armin G. Aberle. 2009. “Crystal Quality Improvement of Solid-Phase Crystallized Evaporated Silicon Films by in-Situ Densification Anneal.” Solar Energy Materials & Solar Cells 93 (6/7): 1116–19. doi:10.1016/j.solmat.2009.01.012.