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Epitaxial electro-optical Sr[sub x]Ba[sub 1-x]Nb[sub 2]O[sub 6] films by single-source....
- Source :
-
Applied Physics Letters . 9/25/1995, Vol. 67 Issue 13, p1836. 3p. 1 Black and White Photograph, 1 Diagram, 3 Graphs. - Publication Year :
- 1995
-
Abstract
- Examines the epitaxial growth of Sr[sub x]Ba[sub 1-x]Nb[sub 2]O[sub 6] (SBN) films on MgO substrates by single source plasma enhanced chemical vapor deposition (PE-CVD) process. Preparation of SBN thin films; Compatibility of oxide thin films and CVD with high oxygen partial pressure; Importance of device quality substrate.
- Subjects :
- *MOLECULAR beam epitaxy
*PLASMA-enhanced chemical vapor deposition
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 67
- Issue :
- 13
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4156449
- Full Text :
- https://doi.org/10.1063/1.115419