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Astigmatism correction in x-ray scanning photoemission microscope with use of elliptical zone plate.

Authors :
Ade, H.
Ko, C.-H.
Source :
Applied Physics Letters. 3/2/1992, Vol. 60 Issue 9, p1040. 3p. 7 Black and White Photographs.
Publication Year :
1992

Abstract

Examines the impact of an elliptical, high resolution zone plate on the performance of an initially astigmatic soft x-ray scanning photoemission microscope. Improvement in spatial resolution; Domination of source size and chromatic aberrations in the resolution; Possibility of a future gain in resolution.

Details

Language :
English
ISSN :
00036951
Volume :
60
Issue :
9
Database :
Academic Search Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
4227274
Full Text :
https://doi.org/10.1063/1.106437