Cite
Thermal nitridation of silicon in a cluster tool.
MLA
Delfino, M., and J. A. Fair. “Thermal Nitridation of Silicon in a Cluster Tool.” Applied Physics Letters, vol. 60, no. 3, Jan. 1992, p. 341. EBSCOhost, https://doi.org/10.1063/1.106651.
APA
Delfino, M., & Fair, J. A. (1992). Thermal nitridation of silicon in a cluster tool. Applied Physics Letters, 60(3), 341. https://doi.org/10.1063/1.106651
Chicago
Delfino, M., and J.A. Fair. 1992. “Thermal Nitridation of Silicon in a Cluster Tool.” Applied Physics Letters 60 (3): 341. doi:10.1063/1.106651.