Cite
Mechanism of chemical erosion of sputter-deposited C:H films.
MLA
Schenk, A., and J. Biener. “Mechanism of Chemical Erosion of Sputter-Deposited C:H Films.” Applied Physics Letters, vol. 61, no. 20, Nov. 1992, p. 2414. EBSCOhost, https://doi.org/10.1063/1.108182.
APA
Schenk, A., & Biener, J. (1992). Mechanism of chemical erosion of sputter-deposited C:H films. Applied Physics Letters, 61(20), 2414. https://doi.org/10.1063/1.108182
Chicago
Schenk, A., and J. Biener. 1992. “Mechanism of Chemical Erosion of Sputter-Deposited C:H Films.” Applied Physics Letters 61 (20): 2414. doi:10.1063/1.108182.