Cite
Effect of substrate charging on the reliability of capacitive RF MEMS switches
MLA
Czarnecki, P., et al. “Effect of Substrate Charging on the Reliability of Capacitive RF MEMS Switches.” Sensors & Actuators A: Physical, vol. 154, no. 2, Sept. 2009, pp. 261–68. EBSCOhost, https://doi.org/10.1016/j.sna.2008.07.003.
APA
Czarnecki, P., Rottenberg, X., Soussan, P., Ekkels, P., Muller, P., Nolmans, P., De Raedt, W., Tilmans, H. A. C., Puers, R., Marchand, L., & De Wolf, I. (2009). Effect of substrate charging on the reliability of capacitive RF MEMS switches. Sensors & Actuators A: Physical, 154(2), 261–268. https://doi.org/10.1016/j.sna.2008.07.003
Chicago
Czarnecki, P., X. Rottenberg, P. Soussan, P. Ekkels, P. Muller, P. Nolmans, W. De Raedt, et al. 2009. “Effect of Substrate Charging on the Reliability of Capacitive RF MEMS Switches.” Sensors & Actuators A: Physical 154 (2): 261–68. doi:10.1016/j.sna.2008.07.003.