Back to Search
Start Over
Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films.
- Source :
-
Applied Physics Letters . 4/2/2001, Vol. 78 Issue 14, p1982. 3p. 3 Graphs. - Publication Year :
- 2001
-
Abstract
- Real-time spectroscopic ellipsometry with an ultraviolet-extended spectral range (1.5-6.5 eV) has been applied to investigate the sputter deposition of boron nitride (BN) thin films with high cubic content in terms of a two-layer optical model. In this model, the inner and outer layers represent sp[sup 2]- and sp[sup 3]-bonded BN (hBN and cBN), respectively. The thickness evolution of the two layers as well as their dielectric functions over the extended spectral range have been determined. © 2001 American Institute of Physics. [ABSTRACT FROM AUTHOR]
- Subjects :
- *BORON nitride
*THIN films
*ELLIPSOMETRY
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 78
- Issue :
- 14
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4710200
- Full Text :
- https://doi.org/10.1063/1.1358367