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Axcelis Product Blitz Continues.

Authors :
Chappell, Jeff
Source :
Electronic News. 6/25/2001, Vol. 47 Issue 26, p30. 3/5p. 2 Color Photographs.
Publication Year :
2001

Abstract

Focuses on ion-implant and rapid thermal processing tools from Axcelis Technologies Inc. Features of the company's HC3 tool; Information on Summit 300XT.

Subjects

Subjects :
*RAPID thermal processing
*ION implantation

Details

Language :
English
ISSN :
10616624
Volume :
47
Issue :
26
Database :
Academic Search Index
Journal :
Electronic News
Publication Type :
Periodical
Accession number :
4719089

Tools

Authors Abstract Subjects Details