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Advances in measurement technology and intelligent instruments for manufacturing engineering.
- Source :
-
International Journal of Advanced Manufacturing Technology . May2010, Vol. 46 Issue 9-12, p843-844. 2p. - Publication Year :
- 2010
-
Abstract
- The article discusses various reports on measurement technology and manufacturing engineering published within the issue, including one on form profile measurement of micro aspheric surface, one on measurement error processing, and one on optical defect detection of next generation semiconductor wafer.
- Subjects :
- *SEMICONDUCTOR wafers
*PRODUCTION engineering
Subjects
Details
- Language :
- English
- ISSN :
- 02683768
- Volume :
- 46
- Issue :
- 9-12
- Database :
- Academic Search Index
- Journal :
- International Journal of Advanced Manufacturing Technology
- Publication Type :
- Academic Journal
- Accession number :
- 47885071
- Full Text :
- https://doi.org/10.1007/s00170-009-2498-5